Last edited by Gom
Tuesday, May 12, 2020 | History

4 edition of 10 years of teaching and research, 5 years of clean room operation found in the catalog.

10 years of teaching and research, 5 years of clean room operation

10 years of teaching and research, 5 years of clean room operation

report 1991-2001

  • 266 Want to read
  • 21 Currently reading

Published by Shaker in Aachen .
Written in English

    Subjects:
  • Technische Universität Braunschweig. -- Institut für Mikrotechnik.,
  • Microelectronics -- Research.,
  • Clean rooms.

  • Edition Notes

    Includes bibliographical references (p. 81-95).

    StatementS. Büttgenbach (editor).
    SeriesBerichte aus der Mikro- und Feinwerktechnik -- Bd. 7
    ContributionsBüttgenbach, S. 1945-
    Classifications
    LC ClassificationsTK7874 .A123 2002
    The Physical Object
    Pagination97 p. :
    Number of Pages97
    ID Numbers
    Open LibraryOL16276445M
    ISBN 103832202838
    LC Control Number2004464711
    OCLC/WorldCa52048288

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